Vyper
Vyper

VYPER

The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with the high power LineBeam 750 (VYPER), LineBeam 1000 (TwinVYPER) and LineBeam 1500 (TriVYPER) optics.

Model Name
Wavelength (nm)
Max. Pulse Frequency (Hz)
Max. Pulse Energy (mJ)
Max. Power (W)
VYPER
308
600
2000
1200
TwinVYPER
600
4000
2400
TriVYPER
600
6000
3600

Applications

Application
Material

• Excimer Laser Annealing
• Laser Lift-Off
• Semiconductor
• Glass
• Polymer
• Plastic

Features & Benefits


VYPER/TwinVYPER/TriVYPER Key Feature
Customer Benefit
Multi-Kilowatt Stabilized UV Power
Fast, large area annealing at lowest costs per Watt
2, 4, or 6 Joule nano-second UV pulse
High silicon annealing efficiency and throughput
Multiple beam combination
Outstanding energy stability by superimposition effect
TimeLok
Stable trigger-to-pulse delay
Laser data acquisition
Evaluation of laser performance best supported by optional ExiScone software
Ethernet interface
Fast remote control and data transfer
Touch panel hand-held terminal
Intuitive laser operation
Sealed and purged beam path
Highest UV transmission efficiency and optics lifetime
Pulse shape analysis
Monitoring of nano-second laser pulses
Motorized optics mounts (optional)
Remote beam adjustment via hand-held control panel